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Semiconductor Equipment
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CD6102 Gas Flow Purity Analyzer
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详情描述
Parameters
性能特征
技术参数
Features
Dual-parameter integrated detection and uploading
◎It supports simultaneous measurement of the leakage concentration and instantaneous flow of hydrogen and displays the total amount of hydrogen discharge;
◎It supports simultaneous data uploading of the concentration, flow and cumulative values to DCS.
Accurate measurement and long-term reliability
◎ider purity measuring range: 0~20% H2;
◎The purity detection unit adopts a unique temperature control design to ensure stable measured value at "Zero" and throughout the full range, preventing the results from changes in ambient temperature;
◎It uses an advanced water-resistant mini flowmeter featuring small pressure loss, large measuring range, and high reliability.
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